MC Microelectronic Fabrication Technology

Course Synopsis

This course on microelectronic fabrication technology covers the fundamental concepts of semiconductor materials, process technologies, and the fabrication steps involved in creating Integrated Circuits (ICs). Students will gain hands-on experience with key fabrication processes, including oxidation, lithography, etching, diffusion, implantation, metallization, and characterization techniques.

Course Outcomes:

CO1: Ability to relate the essential aspects of semiconductor fabrication technology, which include materials, devices, processes, facilities and standard practices.

CO2: Ability to design and appraise important parameters of the wafer cleaning, thermal processes and photolithography process.

CO3: Ability to design and evaluate important parameters of etching, metallization process and CMOS fabrication process module